Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors,...
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors,...
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.].
About this item
Full title
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.].
Publisher
New York : Academic Press, 1980.
Date
1980.
Call Numbers
N621.3817/19
Record Identifier
74VvrO4glkx3
MMS ID
991011290209702626
Language
English
Formats
Physical Description
Physical content
xi, 362 p. : ill. ; 24 cm.
Publication information
Publisher
New York : Academic Press, 1980.
Place of Publication
New York (State)
Date Published
1980.
Subjects
More information
Alternative Titles
Full title
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.].
Authors, Artists and Contributors
Author / Artists
Notes
General note
Includes bibliographies and index.
Identifiers
Primary Identifiers
Call Numbers
N621.3817/19
Record Identifier
74VvrO4glkx3
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvrO4glkx3
Other Identifiers
ISBN
012133550X
012133550X :
DDC
621.3817
MMS ID
991011290209702626
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