Introduction to microelectronic fabrication / Richard C. Jaeger.
Introduction to microelectronic fabrication / Richard C. Jaeger.
About this item
Full title
Introduction to microelectronic fabrication / Richard C. Jaeger.
Author / Creator
Publisher
Reading, Mass. : Addison-Wesley Pub. Co., c1988.
Call Numbers
N621.38173/56
Record Identifier
74VvvGmEp5ey
MMS ID
991007548579702626
Language
English
Formats
Physical Description
Physical content
xiii, 232 p. : ill. ; 24 cm.
Publication information
Publisher
Reading, Mass. : Addison-Wesley Pub. Co., c1988.
Place of Publication
Massachusetts
Date Published
c1988.
Subjects
More information
Alternative Titles
Full title
Introduction to microelectronic fabrication / Richard C. Jaeger.
Authors, Artists and Contributors
Author / Creator
Notes
General note
Modular series on solid state devices ; v. 5.
Includes bibliographical references and index.
Contextual Information
Date Copyright
c1988.
Identifiers
Primary Identifiers
Call Numbers
N621.38173/56
Record Identifier
74VvvGmEp5ey
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvvGmEp5ey
Other Identifiers
ISBN
0201146959 :
9780201146950 :
DDC
621.38173
MMS ID
991007548579702626
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