Advanced processing and characterization technologies : fabrication and characterization of semicond...
Advanced processing and characterization technologies : fabrication and characterization of semiconductor optoelectronic devices and integrated circuits, Clearwater, Fl. 1991 / editor: Paul H. Holloway.
About this item
Full title
Publisher
New York : American Institute of Physics, 1991.
Date
1991.
Call Numbers
N621.367/32
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
xiii, 221 p. : ill. ; 25 cm.
Publication information
Publisher
New York : American Institute of Physics, 1991.
Analytical title
Fabrication and characterization of semiconductor optoelectronic devices and integrated circuits.
Place of Publication
New York (State)
Date Published
1991.
Subjects
More information
Alternative Titles
Full title
Advanced processing and characterization technologies : fabrication and characterization of semiconductor optoelectronic devices and integrated circuits, Clearwater, Fl. 1991 / editor: Paul H. Holloway.
Variant title
Fabrication and characterization of semiconductor optoelectronic devices and integrated circuits.
Authors, Artists and Contributors
Author / Artists
Notes
General note
American Institute of Physics conference proceedings ; no. 227 American vacuum society series ; 10.
Includes bibliographical references and index.
Identifiers
Primary Identifiers
Call Numbers
N621.367/32
Record Identifier
74VvxQ8gdQlg
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvxQ8gdQlg
Other Identifiers
ISBN
0883189100
9780883189108
DDC
621.367
MMS ID
991016855139702626