Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoro...
Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N′,N′-tetramethylethylenediamine)magnesium(II)
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Publisher
Cham: Springer International Publishing
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Language
English
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Cham: Springer International Publishing
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This paper presents a reliable and useful thermochemical information on a mixed-ligand magnesium complex with trifluoroacetylacetonate (tfac) and
N
,
N
,
N
′,
N
′-tetramethylethylenediamine (tmeda), Mg(tmeda)(tfac)
2
, as low melting and highly volatile precursor for metal–organic chemical vapor deposition. New vapor p...
Alternative Titles
Full title
Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N′,N′-tetramethylethylenediamine)magnesium(II)
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TN_cdi_crossref_primary_10_1007_s10973_018_07991_y
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_primary_10_1007_s10973_018_07991_y
Other Identifiers
ISSN
1388-6150
E-ISSN
1588-2926
DOI
10.1007/s10973-018-07991-y
