MEMS Membranes with Nanoscale Holes for Analytical Applications
MEMS Membranes with Nanoscale Holes for Analytical Applications
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Publisher
Switzerland: MDPI AG
Journal title
Language
English
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Publisher
Switzerland: MDPI AG
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Contents
Micro-electro-mechanical membranes having nanoscale holes were developed, to be used as a nanofluidic sample inlet in novel analytical applications. Nanoscopic holes can be used as sampling points to enable a molecular flow regime, enhancing the performance and simplifying the layout of mass spectrometers and other analytical systems. To do this, t...
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Full title
MEMS Membranes with Nanoscale Holes for Analytical Applications
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TN_cdi_doaj_primary_oai_doaj_org_article_3930e6babb2341ccb5b76ca41b1d9c24
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_3930e6babb2341ccb5b76ca41b1d9c24
Other Identifiers
ISSN
2077-0375
E-ISSN
2077-0375
DOI
10.3390/membranes11020074
