Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe f...
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process
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Switzerland: MDPI AG
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English
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Switzerland: MDPI AG
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The importance of monitoring the electron density uniformity of plasma has attracted significant attention in material processing, with the goal of improving production yield. This paper presents a non-invasive microwave probe for in-situ monitoring electron density uniformity, called the Tele-measurement of plasma Uniformity via Surface wave Infor...
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Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process
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TN_cdi_doaj_primary_oai_doaj_org_article_529c4a8337e847e3ba60023453870fb4
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_529c4a8337e847e3ba60023453870fb4
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ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s23052521
