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Correction: Integrated silicon photonic MEMS

Correction: Integrated silicon photonic MEMS

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_c7e6fd2e3b414699b6b53e702306523e

Correction: Integrated silicon photonic MEMS

About this item

Full title

Correction: Integrated silicon photonic MEMS

Publisher

London: Nature Publishing Group UK

Journal title

Microsystems & nanoengineering, 2024, Vol.10 (1), p.17-1, Article 17

Language

English

Formats

Publication information

Publisher

London: Nature Publishing Group UK

More information

Scope and Contents

Contents

[This corrects the article DOI: 10.1038/s41378-023-00498-z.].

Alternative Titles

Full title

Correction: Integrated silicon photonic MEMS

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_doaj_primary_oai_doaj_org_article_c7e6fd2e3b414699b6b53e702306523e

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_c7e6fd2e3b414699b6b53e702306523e

Other Identifiers

ISSN

2055-7434,2096-1030

E-ISSN

2055-7434

DOI

10.1038/s41378-023-00649-2

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