Investigating the effect of nitrogen on the structural and tribo-mechanical behavior of vanadium nit...
Investigating the effect of nitrogen on the structural and tribo-mechanical behavior of vanadium nitride thin films deposited using R.F. magnetron sputtering
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Publisher
New York: Springer US
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Language
English
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New York: Springer US
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Contents
Magnetron sputtering is one of the most commonly used deposition techniques, which has received considerable attention in industrial applications. In particular, owing to its compatibility with conventional fabrication processes, it can produce and fabricate high-quality dense thin films of a wide range of materials. In the present study, nitrogen...
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Full title
Investigating the effect of nitrogen on the structural and tribo-mechanical behavior of vanadium nitride thin films deposited using R.F. magnetron sputtering
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TN_cdi_hal_primary_oai_HAL_hal_03565079v1
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_hal_primary_oai_HAL_hal_03565079v1
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ISSN
0022-2461
E-ISSN
1573-4803
DOI
10.1007/s10853-021-06393-0
