Thermal stability of monolayer WS2 in BEOL conditions
Thermal stability of monolayer WS2 in BEOL conditions
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Bristol: IOP Publishing
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English
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Bristol: IOP Publishing
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Monolayer tungsten disulfide (WS2) has recently attracted a great deal of interest as a promising material for advanced electronic and optoelectronic devices such as photodetectors, modulators, and sensors. Since these devices can be integrated in a silicon (Si) chip via back-end-of-line (BEOL) processes, the stability of monolayer WS2 in BEOL fabr...
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Thermal stability of monolayer WS2 in BEOL conditions
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TN_cdi_iop_journals_10_1088_2515_7639_abd4f2
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_iop_journals_10_1088_2515_7639_abd4f2
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E-ISSN
2515-7639
DOI
10.1088/2515-7639/abd4f2
