Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimpri...
Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimprint lithography (NIL) : comparison of ethylene hydrogenation kinetics
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Full title
Author / Creator
CONTRERAS, A. M , GRUNES, J , YAN, X.-M , LIDDLE, A and SOMORJAI, G. A
Publisher
Dordrecht: Springer
Journal title
Language
English
Formats
Publication information
Publisher
Dordrecht: Springer
Subjects
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Scope and Contents
Contents
Electron beam lithography (EBL), size reduction lithography (SRL), and nanoimprint lithography (NIL) have been utilized to produce platinum nanoparticles and nanowires in the 20–60-nm size range on oxide films (SiO2 and Al2O3) deposited onto silicon wafers. A combination of characterization techniques (SEM, AFM, XPS, AES) has been used to determine...
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Full title
Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimprint lithography (NIL) : comparison of ethylene hydrogenation kinetics
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Author / Creator
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Record Identifier
TN_cdi_proquest_journals_2258972597
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2258972597
Other Identifiers
ISSN
1011-372X
E-ISSN
1572-879X
DOI
10.1007/s10562-004-3436-7