Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-pla...
Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates
About this item
Full title
Author / Creator
Publisher
Dordrecht: Springer Netherlands
Journal title
Language
English
Formats
Publication information
Publisher
Dordrecht: Springer Netherlands
Subjects
More information
Scope and Contents
Contents
Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model bas...
Alternative Titles
Full title
Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2259454104
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2259454104
Other Identifiers
ISSN
0924-090X
E-ISSN
1573-269X
DOI
10.1007/s11071-017-4007-y
