Controllable p-type Doping of 2D WSe2 via Vanadium Substitution
Controllable p-type Doping of 2D WSe2 via Vanadium Substitution
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Ithaca: Cornell University Library, arXiv.org
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English
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Ithaca: Cornell University Library, arXiv.org
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Scalable substitutional doping of two-dimensional (2D) transition metal dichalcogenides (TMDCs) is a prerequisite to developing next-generation logic and memory devices based on 2D materials. To date, doping efforts are still nascent. Here, we report scalable growth and vanadium (V) doping of 2D WSe2 at front-end-of-line (FEOL) and back-end-of-line...
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Full title
Controllable p-type Doping of 2D WSe2 via Vanadium Substitution
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TN_cdi_proquest_journals_2556165638
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2556165638
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E-ISSN
2331-8422
DOI
10.48550/arxiv.2107.13413
