On the Phosphorus Evaporation from Liquid Silicon by Knudsen Effusion Mass Spectrometry
On the Phosphorus Evaporation from Liquid Silicon by Knudsen Effusion Mass Spectrometry
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Publisher
New York: Springer US
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Language
English
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Publisher
New York: Springer US
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Silicon refining for solar applications is intensively on demand, and removal of phosphorus from Si is one of the most challenging steps. Evaporation of P from liquid Si in a vacuum refining process is the most efficient method for P removal from Si, and this research deals with the insight mechanisms of P evaporation from liquid Si. In this resear...
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Full title
On the Phosphorus Evaporation from Liquid Silicon by Knudsen Effusion Mass Spectrometry
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TN_cdi_proquest_journals_2638313056
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2638313056
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ISSN
1073-5615
E-ISSN
1543-1916
DOI
10.1007/s11663-022-02445-1
