Study of the optical response of oxidized porous silicon structures by thermal oxidation in air
Study of the optical response of oxidized porous silicon structures by thermal oxidation in air
About this item
Full title
Author / Creator
Publisher
New York: Springer US
Journal title
Language
English
Formats
Publication information
Publisher
New York: Springer US
Subjects
More information
Scope and Contents
Contents
This work proposes a methodology based on porous silicon (PSi) thermal oxidation in an air atmosphere to reduce its optical losses and change the optical response of one-dimensional photonic structures through the porosity variations, pore filling, and refractive index tuning. First, electrochemical etching was used to fabricate PSi samples at two...
Alternative Titles
Full title
Study of the optical response of oxidized porous silicon structures by thermal oxidation in air
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2679962651
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2679962651
Other Identifiers
ISSN
0022-2461
E-ISSN
1573-4803
DOI
10.1007/s10853-022-07376-5
