High-speed growth of high-quality polycrystalline diamond films by MPCVD
High-speed growth of high-quality polycrystalline diamond films by MPCVD
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Author / Creator
Chen, Kai , Tao, Tao , Hu, Wenxiao , Ye, Yucong , Zheng, Kaiwen , Ye, Jiandong , Zhi, Ting , Wang, Xiwei , Liu, Bin and Zhang, Rong
Publisher
Singapore: Springer Nature Singapore
Journal title
Language
English
Formats
Publication information
Publisher
Singapore: Springer Nature Singapore
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Scope and Contents
Contents
High-quality diamond films have attracted extensive attentions due to their excellent optical and electrical properties. However, several issues, such as random orientation, stress accumulation, and slow growth rate, severely limit its applications. In this paper, high-quality polycrystalline diamond films with highly ordered (100) orientation were...
Alternative Titles
Full title
High-speed growth of high-quality polycrystalline diamond films by MPCVD
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Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2921068892
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2921068892
Other Identifiers
ISSN
1976-4251
E-ISSN
2233-4998
DOI
10.1007/s42823-023-00534-y