Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films: R...
Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films: Ruthenium target with uniform and fine grain can obtain better electrical properties
About this item
Full title
Author / Creator
Shen, Yue , Xu, Yanting , Gan, Jun , Zhang, Renyao and Wen, Ming
Publisher
London: Johnson Matthey PLC
Journal title
Language
English
Formats
Publication information
Publisher
London: Johnson Matthey PLC
Subjects
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Scope and Contents
Contents
Ruthenium targets were prepared by vacuum hot pressing of ruthenium powder with different morphologies. Ruthenium films were then deposited on a SiO
2
/Si(100) substrate for different times by radio frequency (RF) magnetron sputtering. The relationship in terms of the microstructure and electrical properties between the ruthenium targets and...
Alternative Titles
Full title
Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films: Ruthenium target with uniform and fine grain can obtain better electrical properties
Authors, Artists and Contributors
Author / Creator
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Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_3153303883
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_3153303883
Other Identifiers
ISSN
2056-5135
E-ISSN
2056-5135
DOI
10.1595/205651323X16859589078188
