nano scale, mega scope
nano scale, mega scope
About this item
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Author / Creator
Publisher
Stevenage: The Institution of Engineering and Technology
Journal title
Language
English
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Publisher
Stevenage: The Institution of Engineering and Technology
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Contents
Research in China has shown that a common hybrid circuit component has potential for use as a micro-actuator. The industrial grade MLCCs tested display surprisingly little hysteresis, suggesting they could be of interest in many micro-actuation applications including nanoposition for scanning probe microscopes. Micro-actuation used for nanoposition...
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Full title
nano scale, mega scope
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Author / Creator
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Record Identifier
TN_cdi_proquest_miscellaneous_1551052594
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1551052594
Other Identifiers
ISSN
1350-911X,0013-5194
E-ISSN
1350-911X
DOI
10.1049/el.2014.0898