Advanced scanning probe lithography
Advanced scanning probe lithography
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Publisher
London: Nature Publishing Group UK
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Language
English
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Publisher
London: Nature Publishing Group UK
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Contents
This article reviews the fundamentals and applications of scanning probe lithography, focusing on the methods that offer genuinely lithographic capabilities such as those based on thermal effects, chemical reactions and voltage-induced processes.
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide...
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Full title
Advanced scanning probe lithography
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Author / Creator
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TN_cdi_proquest_miscellaneous_1770377775
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1770377775
Other Identifiers
ISSN
1748-3387
E-ISSN
1748-3395
DOI
10.1038/nnano.2014.157
