A flexoelectric microelectromechanical system on silicon
A flexoelectric microelectromechanical system on silicon
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Publisher
London: Nature Publishing Group UK
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Language
English
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Publisher
London: Nature Publishing Group UK
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Contents
Cantilevers made of SrTiO
3
grown on silicon use the flexoelectric effect to achieve electromechanical performances similar to piezoelectric bimorph cantilevers.
Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment
1
and, conversely, to bend in response to an electric field
2
. Co...
Alternative Titles
Full title
A flexoelectric microelectromechanical system on silicon
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TN_cdi_proquest_miscellaneous_1793276828
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1793276828
Other Identifiers
ISSN
1748-3387
E-ISSN
1748-3395
DOI
10.1038/nnano.2015.260
