Integrating graphene into semiconductor fabrication lines
Integrating graphene into semiconductor fabrication lines
About this item
Full title
Integrating graphene into semiconductor fabrication lines
Author / Creator
Publisher
London: Nature Publishing Group UK
Journal title
Nature materials, 2019-06, Vol.18 (6), p.525-529
Language
English
Formats
Publication information
Publisher
London: Nature Publishing Group UK
Subjects
More information
Scope and Contents
Contents
Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization.
Alternative Titles
Full title
Integrating graphene into semiconductor fabrication lines
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_miscellaneous_2232073627
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_2232073627
Other Identifiers
ISSN
1476-1122
E-ISSN
1476-4660
DOI
10.1038/s41563-019-0359-7
