Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization
Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization
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Publisher
Washington, DC: American Association for the Advancement of Science
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Language
English
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Washington, DC: American Association for the Advancement of Science
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Contents
In conventional photolithography, diffraction limits the resolution to about one-quarter of the wavelength of the light used. We introduce an approach to photolithography in which multiphoton absorption of pulsed 800-nanometer (nm) light is used to initiate cross-linking in a polymer photoresist and one-photon absorption of continuous-wave 800-nm l...
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Full title
Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization
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TN_cdi_proquest_miscellaneous_67257677
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_67257677
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ISSN
0036-8075
E-ISSN
1095-9203
DOI
10.1126/science.1168996
