Macau University of Science and Technology; Patent Issued for Optimal Buffer Space Configuration and...
Macau University of Science and Technology; Patent Issued for Optimal Buffer Space Configuration and Scheduling for Single-Arm Multi-Cluster Tools (USPTO 9227318)
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Atlanta: NewsRx
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English
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Atlanta: NewsRx
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Contents
N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, 'A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints,' IEEE Transactions on Semiconductor Manufacturing, vol. 21, pp. 224-237, 2008a. N. Q. Wu, F. Chu, C. Chu, and M. Zhou, 'Petri Net-Based Scheduling of Single-Arm Cluster Tools...
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Macau University of Science and Technology; Patent Issued for Optimal Buffer Space Configuration and Scheduling for Single-Arm Multi-Cluster Tools (USPTO 9227318)
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TN_cdi_proquest_wirefeeds_1756633642
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1756633642
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ISSN
1944-1630
