Macau University of Science and Technology; Patent Issued for Scheduling Start-Up Process for Time-C...
Macau University of Science and Technology; Patent Issued for Scheduling Start-Up Process for Time-Constrained Single-Arm Cluster Tools (USPTO 9618930)
About this item
Full title
Publisher
Atlanta: NewsRx
Journal title
Language
English
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Publication information
Publisher
Atlanta: NewsRx
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Scope and Contents
Contents
News editors obtained the following quote from the background information supplied by the inventors: "Field of the Invention "The present invention generally relates to scheduling a cluster tool, where the cluster tool has a single-arm robot for wafer handling, and plural process modules each for performing a wafer-processing step with a wafer resi...
Alternative Titles
Full title
Macau University of Science and Technology; Patent Issued for Scheduling Start-Up Process for Time-Constrained Single-Arm Cluster Tools (USPTO 9618930)
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Record Identifier
TN_cdi_proquest_wirefeeds_1889903183
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1889903183
Other Identifiers
ISSN
1944-1630
