Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer
Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer
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Publisher
London: Nature Publishing Group UK
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Language
English
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Publisher
London: Nature Publishing Group UK
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Contents
Single-crystal silicon carbide (SiC) thin-films on silicon (Si) were used for the fabrication and characterization of electrically conductive distributed Bragg reflectors (DBRs) on 100 mm Si wafers. The DBRs, each composed of 3 alternating layers of SiC and Al(Ga)N grown on Si substrates, show high wafer uniformity with a typical maximum reflectanc...
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Full title
Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer
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TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_4658498
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_4658498
Other Identifiers
ISSN
2045-2322
E-ISSN
2045-2322
DOI
10.1038/srep17026
