Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin...
Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering
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Full title
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Publisher
Basel: MDPI AG
Journal title
Language
English
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Publisher
Basel: MDPI AG
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Scope and Contents
Contents
The paper presents the results of an investigation of the influence of technological parameters on the microstructure, optical, electrical and nanomechanical properties of zinc oxide coatings prepared using the pulsed reactive magnetron sputtering method. Three sets of ZnOx thin films were deposited in metallic, shallow dielectric and deep dielectr...
Alternative Titles
Full title
Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering
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Record Identifier
TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_9571499
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_9571499
Other Identifiers
ISSN
1996-1944
E-ISSN
1996-1944
DOI
10.3390/ma15196551
