Estimating Step Heights from Top-Down SEM Images
Estimating Step Heights from Top-Down SEM Images
About this item
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Publisher
New York, USA: Cambridge University Press
Journal title
Language
English
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Publication information
Publisher
New York, USA: Cambridge University Press
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Scope and Contents
Contents
Scanning electron microscopy (SEM) is one of the most common inspection methods in the semiconductor industry and in research labs. To extract the height of structures using SEM images, various techniques have been used, such as tilting a sample, or modifying the SEM tool with extra sources and/or detectors. However, none of these techniques focuse...
Alternative Titles
Full title
Estimating Step Heights from Top-Down SEM Images
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Record Identifier
TN_cdi_proquest_miscellaneous_2232086537
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_2232086537
Other Identifiers
ISSN
1431-9276
E-ISSN
1435-8115
DOI
10.1017/S143192761900062X
